| 摘要 |
PURPOSE: An apparatus for manufacturing a biochip by photolithography is provided to reduce manufacturing cost and time and to monitor manufacturing process in real time. CONSTITUTION: An apparatus for manufacturing a biochip comprises: a reaction chamber(120) in which the biochip is arranged and which closes the biochip from the outside; a light exposing system comprising a light source and space light modulator(108) and providing light image to the biochip; and a monitoring system which monitors light image in real time. The space light modulator is a reflective space light modulator. The space light modulator comprises a LCoS(Liquid Crystal on Silicon) or DMD(Digital Micromirror Device). The light exposing system comprises light diffusion element, lens element or mirror element which is arranged between 1/4 wave length plate and space light modulator.
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