发明名称 |
Distributed Bragg Reflector Waveguide and Fabricating Method Thereof |
摘要 |
A method for fabricating a distributed Bragg reflector waveguide is disclosed, which includes forming a first distributed Bragg reflector on a substrate; forming a sacrificial pattern on the first distributed Bragg reflector; forming a second distributed Bragg reflector on the sacrificial pattern and the first distributed Bragg reflector; and removing the sacrificial pattern. A distributed Bragg reflector waveguide is also disclosed.
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申请公布号 |
US2010104235(A1) |
申请公布日期 |
2010.04.29 |
申请号 |
US20090390596 |
申请日期 |
2009.02.23 |
申请人 |
NATIONAL CENTRAL UNIVERSITY |
发明人 |
CHEN CHII-CHANG;CHIU HUA-KUNG |
分类号 |
G02F1/295;H01L21/02 |
主分类号 |
G02F1/295 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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