发明名称 Distributed Bragg Reflector Waveguide and Fabricating Method Thereof
摘要 A method for fabricating a distributed Bragg reflector waveguide is disclosed, which includes forming a first distributed Bragg reflector on a substrate; forming a sacrificial pattern on the first distributed Bragg reflector; forming a second distributed Bragg reflector on the sacrificial pattern and the first distributed Bragg reflector; and removing the sacrificial pattern. A distributed Bragg reflector waveguide is also disclosed.
申请公布号 US2010104235(A1) 申请公布日期 2010.04.29
申请号 US20090390596 申请日期 2009.02.23
申请人 NATIONAL CENTRAL UNIVERSITY 发明人 CHEN CHII-CHANG;CHIU HUA-KUNG
分类号 G02F1/295;H01L21/02 主分类号 G02F1/295
代理机构 代理人
主权项
地址