Micromechanical pressure sensor element manufacturing method, involves varying air flow during sputtering process, so that higher air doping is produced in volume of nickel-chromium-silicon layer than within area of layer close to surface

摘要

The method involves applying a nickel-chromium-silicon (NiCrSi) layer on a membrane surface in a sputtering process, where the NiCrSi layer is air-doped by bringing a preset air flow into a layer separation area. The air flow is varied during the sputtering process, so that a higher air doping is produced in the volume of the NiCrSi layer than within an area of the NiCrSi layer close to the membrane surface. The air flow is continuously reduced during the sputtering process, where the sputtering process is made in an argon atmosphere. An independent claim is also included for a pressure sensor element with a membrane and a measuring element.