| 摘要 |
<p>A positive photosensitive resin composition for spray coating, which contains an alkali-soluble resin, a compound that generates an acid when exposed to light and a solvent, and has a viscosity of 0.5-200 cP. By using the positive photosensitive resin composition, a uniform coating film can be formed on the inner surface of a hole having a high aspect ratio. By using a coating film pattern, which is obtained by exposing and developing a certain region of the thus-obtained coating film, as an insulating film or a pattern-forming mask for an insulating film, generation of leakage current within the hole is suppressed, thereby enabling formation of a through hole with high yield.</p> |
