| 摘要 |
PURPOSE: A temperature measuring device is provided to accurately measure temperature of a substrate and prevent a top surface from contamination film being formed by a tube-shaped rod of a temperature measuring device. CONSTITUTION: A temperature measuring device(600) comprises: a tube-shaped rod(620) which receives radiation emitted from an object; an optical fiber(640) which is connected on the bottom of the tube-shaped rod and transfers the radiation; a window(650) which is placed between the tube-shaped rod and the optical fiber; a rod connection body which protects a connection of the tube shaped rod and the optical fiber; and a pyrometer(680).
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