| 摘要 |
The disclosure provides Hall effect device configurations capable of measuring magnetic fields in two dimensions (2D) and three dimensions (3D) along with associated microelectromechanical system (MEMS) manufacturing methods. The present invention includes various geometric layout configurations for 2D and 3D Hall effect devices with multidimensional magnetic field sensing elements. Advantageously, the present invention can provide, simultaneously and independently, absolute measurement of each of the components (i.e., x-, y-, and z-components) of a magnetic field. Additionally, the geometric layout configurations enable the Hall effect devices to be constructed with MEMS fabrication techniques.
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