| 发明名称 |
Cleaning device for cleaning wafer block, has nozzle units provided at left side and right side of wafer block, where nozzle unit has multiple nozzle heads with multiple nozzle openings for bearing cleaning fluid |
| 摘要 |
<p>The cleaning device has nozzle units provided at a left side and right side of a wafer block (40). The nozzle unit has multiple nozzle heads with multiple nozzle openings for bearing cleaning fluid. The nozzle openings are provided in a vertical direction.</p> |
| 申请公布号 |
DE102008053597(A1) |
申请公布日期 |
2010.04.22 |
| 申请号 |
DE20081053597 |
申请日期 |
2008.10.15 |
| 申请人 |
GEBR. SCHMID GMBH & CO. |
发明人 |
LAMPPRECHT, JOERG;PLAUELN, DIRK;WOLBER, GERHARD |
| 分类号 |
H01L21/302;H01L21/304 |
主分类号 |
H01L21/302 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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