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摘要
申请公布号
JP4454621(B2)
申请公布日期
2010.04.21
申请号
JP20060356433
申请日期
2006.12.28
申请人
发明人
分类号
H01L21/31;C23C16/455;H01L21/205;H01L21/3065
主分类号
H01L21/31
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