METHOD FOR FORMING A BRITTLE ZONE IN A SUBSTRATE BY CO-IMPLANTATION,申请号EP20030767871-传众专利搜索

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发明名称	METHOD FOR FORMING A BRITTLE ZONE IN A SUBSTRATE BY CO-IMPLANTATION
摘要
申请公布号	EP1559138(B1)	申请公布日期	2010.04.21
申请号	EP20030767871	申请日期	2003.10.31
申请人	COMMISSARIAT A L'ENERGIE ATOMIQUE	发明人	ASPAR, BERNARD;LAGAHE, CHRISTELLE;SOUSBIE, NICOLAS;MICHAUD, JEAN-FRANCOIS
分类号	H01L21/762;H01L21/265	主分类号	H01L21/762
代理机构		代理人
主权项
地址

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