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发明名称
FLOODING CHAMBER FOR COATING INSTALLATIONS
摘要
申请公布号
KR100954040(B1)
申请公布日期
2010.04.20
申请号
KR20080018405
申请日期
2008.02.28
申请人
发明人
分类号
H01L21/00;H01L21/02;H01L21/08
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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