Vorrichtung zur Vermessung eines Werkstücks sowie Messverfahren unter Einsatz einer derartigen Vorrichtung

摘要

The device (1) has a measuring probe (9) movable relative to a workpiece holder (4). An evaluation circuit (18) is connected with measuring probe and reference electrode bodies (12, 2) over respective measuring lines (14, 7). A direct current voltage source (8) is connected with the lines, and the circuit is designed such that it measures tunnel current between the bodies. The probe has a ball shaped measuring head that is connected with a measuring head holder (13) by inserting into the head, where a diameter of the head is greater than thickness of the holder at the insertion into the head. An independent claim is also included for a method for measuring a workpiece.