| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a film inspection device capable of detecting accurately a defect generated on a film during manufacture. Ž<P>SOLUTION: This inspection device 10 is equipped with a light irradiation device 16 for irradiating a film 12 with each light L1, L2, and forming regularly reflected light; and a sensor 18 for detecting a defect. Light bands 22 are generated on the film 12, and the sensor 18 uses a dark part 24 therebetween as a detection domain. Though a light receiving amount by the sensor 18 is small normally, when scattered light is generated by a defect, the light receiving amount is increased, to thereby detect the defect. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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