| 摘要 |
PROBLEM TO BE SOLVED: To form simply a space for storing etching liquid on the surface, and to prevent leak of the etching liquid, in a method for analyzing nondestructively a metal included in a surface layer of a quartz glass product such as a quartz glass tube. SOLUTION: A ring-shaped member 10 made of a polyethylene resin is placed on a surface to be analyzed of the quartz glass tube 3, heated and melted by a hot plate 4, and welded integrally on the surface, to thereby form a storage space for etching liquid. Hydrofluoric acid is injected and stored into the storage space to keep a contact state for a fixed time, to thereby dissolve as deep as 1μm. A part of dissolved solution is sampled, and a dissolved quartz glass amount is determined by an inductively coupled plasma emission spectrometry. Further, residual dissolved solution is vaporized and dried, and then an evaporation residue is dissolved with dilute nitric acid to obtain recovery liquid, and a metal amount in the recovery liquid is determined by an inductively coupled plasma mass spectrometry. COPYRIGHT: (C)2010,JPO&INPIT
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