| 摘要 |
<P>PROBLEM TO BE SOLVED: To measure a step response of an optical system at high accuracy. Ž<P>SOLUTION: The optical system includes: a light source; a light receiving section for receiving a light from the light source through the optical system; a control section for sequentially having the light receiving section receive lights of different intensity by changing a light intensity from the light source; and an intensity distribution calculating section for calculating a light intensity distribution by optical systems, based on respective amounts of light of different light intensity received by the light receiving section. The intensity distribution calculating section may calculate an intensity distribution of a lower intensity area out of the amount of light in the case of a higher light intensity from the light source. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
