| 摘要 |
System for monitoring a position of one or more optical elements in a projection objective (PO) include a plurality of sensors each configured to receive input light and to form output light, each sensor including a first sensor optic and a second sensor optic, the first sensor optic of at least one of the sensors being affixed to a first PO optical element and the second sensor optic of the at least one sensor being affixed to a support element that positions the first PO optical element within the PO, the first and second sensor optics being configured to introduce a first optical path length difference (OPD) between two components of the input light to form the output light, the first OPD being related to the position of the first PO optical element with respect to the support element. The systems also include a plurality of detectors configured to detect the output light from the sensors, a plurality of optical fibers configured to direct the input light to the sensors and to direct the output light from the sensors to the detectors, and an electronic controller in communication with the plurality of detectors, the electronic controller being configured to determine information about the position of the first PO optical element relative to the support element based on the detected output light from the at least one sensor.
|
