摘要 |
The present invention provides a reliable, non-invasive, electrical test method for predicting satisfactory performance of electrostatic chucks (ESCs). In accordance with an aspect of the present invention, a parameter, e.g., impedance, of an ESC is measured over a frequency band to generate a parameter functions. This parameter function may be used to establish predetermined acceptable limits of the parameter within the frequency band. |
申请人 |
LAM RESEARCH CORPORATION;SHIH, HONG;ULLAL, SAURABH;HUANG, TUOCHUAN;FANG, YAN;MCCHESNEY, JON |
发明人 |
SHIH, HONG;ULLAL, SAURABH;HUANG, TUOCHUAN;FANG, YAN;MCCHESNEY, JON |