| 摘要 |
<p>The sensor (1) has a temperature measuring device (3) e.g. resistance thermometer, provided at a surface of a ceramic sensor element, and a heating device for heating the sensor element at steam temperature. The sensor element exhibits a layer structure. The sensor element is made of silicate, aluminum oxide, silicon carbide, quartz glass, silicon nitride, aluminum nitride, zirconium oxide and low temperature co-fired ceramic. The heating device is made of tungsten, platinum, palladium, nickel, zirconium oxide and ceramic. The heating device is insulated with respect to the sensor element. An independent claim is also included for a method for detection of droplets in a steam.</p> |
