| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a sensor which detects angular velocities of three axes by using only one normal vibration produced by driving a plurality of vibrators in a coupled fashion, and to enable the inertial sensor to be made compact. <P>SOLUTION: The inertial sensor includes: a fixing part 31; and a first vibrator 21, a second vibrator 22, a third vibrator 23 and a fourth vibrator 24 which are supported by the fixing part 13 through elastic support bodies 31-34. The first vibrator 21 and the third vibrator 23 are arranged on positions being on the X-axis and symmetric in regard to the origin O of the X-axis, and the second vibrator 22 and the fourth vibrator 24 are arranged on positions being on the Y-axis perpendicularly intersecting with the X-axis and symmetric in regard to the origin O of the Y-axis whose position is identical to that of the origin O of the X-axis, and areas between respective adjacent vibrators being the first vibrator 21, the second vibrator 22, the third vibrator 23 and the fourth vibrator 24 are supported by elastic coupling bodies 41-44. <P>COPYRIGHT: (C)2010,JPO&INPIT |
