| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope system capable of acquiring a clear image by correcting a focus drift even when a distortion is caused in a microscope device, reducing costs, and acquiring a synthesized image at a high speed. SOLUTION: A focus map creation part 31 acquires a focusing position at an arbitrary position of an observation object 70, records the arbitrary position and the focusing coordinates as reference coordinates in a memory, makes a forecast using the reference coordinates, and creates a focus map indicative of the focusing coordinates distributed in an observation area where the observation object is observed. A focus map correction part 32 updates a focus map when predetermined conditions by time, heat and the like are met. COPYRIGHT: (C)2010,JPO&INPIT |
