| 发明名称 |
METHOD OF MANUFACTURING LAMINATED BODY |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a laminated body by which a metal oxide film excellent in thickness precision is formed and a pattern-shaped metal oxide film is easily formed. <P>SOLUTION: The method of manufacturing the laminated body includes: a precursor film forming step of forming a precursor film which is a precursor of the metal oxide film on a substrate using a raw material solution in which a metallic salt or an organic metallic compound is dissolved as a metal source; and a heating step of applying a heating treatment having a directivity to the precursor film from the surface side of the precursor film to form the metal oxide film. <P>COPYRIGHT: (C)2010,JPO&INPIT |
| 申请公布号 |
JP2010077463(A) |
申请公布日期 |
2010.04.08 |
| 申请号 |
JP20080244276 |
申请日期 |
2008.09.24 |
| 申请人 |
DAINIPPON PRINTING CO LTD |
发明人 |
YAMAZAKI MASAYASU;KOBORI HIROYUKI;NOMURA KEISUKE |
| 分类号 |
C23C24/08;H01M8/02;H01M8/12 |
主分类号 |
C23C24/08 |
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