| 摘要 |
A method for manufacturing a master includes the steps of forming an inorganic resist layer on a master-forming substrate and forming, on a surface of the inorganic resist layer, a protective thin film containing a high-refractive-index material which has a refractive index n satisfying n≧NA of an exposure optical system and which is mixed in a light-transmitting material, performing near-field exposure with NA>1 on the protecting thin film using an exposure optical system, separating the protective thin film from an inorganic resist master subjected to the exposure, and forming a protrusion/depression pattern including exposed portions and unexposed portions by development of the inorganic resist master from which the protective thin film is separated.
|
