发明名称 |
Target assemblies, targets, backing plates, and methods of target cooling |
摘要 |
The invention includes backing plates having coolant deflectors with at least a portion of each of the deflectors being nonlinear. Projections projecting from the backing plate are configured to insert into openings within a sputtering target. The invention includes targets having at least one opening to receive a fastener extending into the target through a back surface. The invention includes a target assembly having projections projecting from the backing plate and insertable within openings within the target. The invention includes a target assembly having a plurality of coolant deflectors disposed between the target and the backing plate. A segment of each of the deflectors is nonlinear. The invention includes methods of cooling a target. Coolant deflectors are disposed within a gap between the target and a backing plate with coolant deflectors being nonlinear along at least a portion of their length.
|
申请公布号 |
US7691240(B2) |
申请公布日期 |
2010.04.06 |
申请号 |
US20060415930 |
申请日期 |
2006.05.01 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
HORT WERNER H.;SAYLES SCOTT R.;SPEZIALE VINCE;FERRASSE STEPHANE;DETLAFF HAROLD A.;WRIGHT STUART D.;ALFORD FRANK;WRAGG ANDREW N. A. |
分类号 |
C23C14/34 |
主分类号 |
C23C14/34 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|