PIEZOELECTRIC ELEMENT, METHOD OF MANUFACTURING THE SAME, AND LIQUID DISCHARGER

摘要

PROBLEM TO BE SOLVED: To provide a novel patterning technology capable of inexpensively and easily patterning a piezoelectric film without need of expensive equipment, having excellent pattern shaping accuracy of the film and free from contamination during film formation.

SOLUTION: A step (A) of forming a solid piezoelectric film 30P not patterned on a substrate 10 having a lower electrode 20 formed, a step (B) of forming a removal electrode 41 having a pattern corresponding to an unnecessary part 30N of the solid piezoelectric film for removing the unnecessary part 30N of the solid piezoelectric film on the film 30P, a step (C) of applying an electric field between the lower electrode 20 and the removal electrode 41 for causing a crack on the electrode 41 and the unnecessary part 30N of the solid piezoelectric film, and a step (D) of removing the removal electrode 41 and the unnecessary part 30N of the solid piezoelectric film are sequentially carried out.

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