| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface inspection apparatus detecting all kinds of defects such as thickness variation, a flaw, a projection, a foreign substance, color irregularity, and the like occurring on a photoreceptor surface, by adding a new processing flow to a conventional three-dimensional measurement method using a stripe pattern projection method and Fourier transformation, and to provide a defect detecting method using the surface inspection apparatus, a program and a recording medium. Ž<P>SOLUTION: This surface inspection apparatus comprises a means for projecting a stripe pattern on an object, a means for imaging the surface of the object, a means for calculating three-dimensional shape data of the object by the Fourier transformation based on the image data of the object, a means for detecting a defect based on a high frequency component of the image data, and a means for detecting the defect based on a low frequency component. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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