| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an organic EL element of superior manufacturing efficiency capable of suppressing damage to an organic EL layer when a protective film is deposited, and to provide a method of manufacturing the organic EL element and an organic EL display device. Ž<P>SOLUTION: The organic EL element 30 includes a first electrode 31, an organic EL layer 32 provided on the first electrode 31, a second electrode 33 provided on the organic EL layer 32, and a protective film 34 so provided as to cover the second electrode 33. The protective film 34 is, in an ion beam sputter method, deposited in relatively small ion beam input power density in the initial stages, and then deposited in relatively large ion beam input power density. The organic EL display device 10 includes the organic EL element 30. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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