| 摘要 |
PROBLEM TO BE SOLVED: To obtain a recycled coating liquid which includes minimum difference of the characteristics between an initial fresh coating liquid and the recycled coating liquid. SOLUTION: The coating liquid recycling device is provided with: a recycling tank which is connected to coating equipment, and to which a coating waste liquid in the coating equipment is recovered, and in which the recycled coating liquid is produced by mixing the recovered waste liquid with a diluting solvent and the fresh coating liquid, and from which the produced recycled coating liquid is supplied to the coating equipment; a solvent tank which is connected to the recycling tank, and to which the diluting solvent is supplied to adjust the viscosity of the coating waste liquid recovered in the recycling tank; and a fresh liquid tank which is connected to the recycling tank, and from which the fresh coating liquid is supplied to the recycling tank. The coating liquid recycling method using the same is also provided. COPYRIGHT: (C)2010,JPO&INPIT
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