发明名称 DIGITAL EXPOSURE DEVICE
摘要 PURPOSE: A digital exposure apparatus uses a plurality of shutters corresponding to a plurality of point source of lights. The purpose section is exposed precisely without mask. CONSTITUTION: An exposure apparatus comprises the point source of light part(100) and micro shutter area(300). The point source of light part comprises a plurality of point source of lights. The micro shutter area comprises the micro shutter of the respective plurality of coping with a plurality of point source of lights. According to opening or the selective seal of the micro shutter, the illumination light from the point source of light is passed through in the microarray shutter area or it is quarantined to the MI ink with the shutter area.
申请公布号 KR20100034961(A) 申请公布日期 2010.04.02
申请号 KR20080094214 申请日期 2008.09.25
申请人 KANG, HEUNG SEOK;HA, HAE DONG;YANG, SEONG JOON 发明人 KANG, HEUNG SEOK;HA, HAE DONG;YANG, SEONG JOON
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
主权项
地址