| 发明名称 |
Controlling substrate surface properties via colloidal coatings |
| 摘要 |
Methods and apparatus to control surface properties via colloidal coatings are described. In one embodiment, colloidal coating may be used on a surface to enhance flow control. Other embodiments are also described.
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| 申请公布号 |
US7687890(B2) |
申请公布日期 |
2010.03.30 |
| 申请号 |
US20070729644 |
申请日期 |
2007.03.29 |
| 申请人 |
INTEL CORPORATION |
发明人 |
SUBRAMANIAN GOPALAKRISHNAN;CHAKRAPANI NIRUPAMA;DECESARE LARRY;GOKHALE SHRIPAD;MURPHY JASON;WANG JINLIN |
| 分类号 |
H01L23/00;H01L21/00 |
主分类号 |
H01L23/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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