MEASUREMENT APPARATUS FOR DYNAMIC CRYSTALLIZATION DIRECTION FOR TEMPERATURE

摘要

PURPOSE: A dynamic crystallization direction measurement system is provided to easily measure the property of materials due to the temperature change by using a SEM(Scanning Electron Microscopy) and a EBSD(Electron Back Scattered Diffraction). CONSTITUTION: An SEM(100) measures the shape of materials by scanning an electronic beam on a material located in a vacuum chamber(110). A EBSD(200) measures a crystallization direction through the scattering of an electronic beam scanned through the SEM in the vacuum chamber. A heating unit(300) applies heat to change the temperature of the material within the vacuum chamber. A heater controlling unit(400) sets a temperature in the vacuum chamber by controlling the heating part. A terminal(500) controls the heater controlling unit activating the heating unit.