| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrolytic treatment method by which uniform electrolytic treatment in a substrate surface is achieved by keeping the temperature of an electrolytic solution at a predetermined value, even when a high-resistance porous body is used, this porous body generates heat in accordance with the progress of electrolytic treatment such as electroplating, and the temperature of the electrolytic solution rises. Ž<P>SOLUTION: An electrolytic treatment apparatus is provided, which includes: an anode head 46 containing an anode 58 therein and having a housing 48 whose bottom opening is blocked up with a porous body 50; a cathode portion 32 having a seal ring 34 which is brought into contact with the peripheral part of the surface to be treated of the substrate held by a substrate holding part 30 and seals the peripheral part, and also having a cathode contact 36 to electrify the surface to be treated by contact with the peripheral part; an anode side liquid circulation line 70 through which a temperature-controlled electrolytic solution is supplied and circulated in the housing 48 in such a way that the electrolytic solution is in contact with the porous body 50; and a substrate side liquid circulation line 72 through which the temperature-controlled electrolytic solution is supplied to the space between the porous body 50 and the substrate W and circulated when the porous body 50 is located in an electrolytic treatment position close to the substrate W. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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