PROCESS AND SYSTEM FOR PROVIDING ACETYLENE

摘要

PURPOSE: A process and a system for providing acetylene are provided to transfer acetylene to a high purity level for a semiconductor manufacturing process, and to increase use efficiency of acetylene cylinder capacity. CONSTITUTION: A process for providing a high purity acetylene comprising 100 ppm or less solvent to a point of use comprises: providing an acetylene feed stream comprising acetylene and solvent at a temperature ranging from 20 deg.C to -50 deg.C; introducing the acetylene feed stream to a purifier at a temperature ranging from -50 deg.C to 30 deg.C to remove at least a portion of the solvent contained therein and provide the high purity acetylene.