发明名称 DRAWING APPARATUS, DRAWING DATA CONVERSION METHOD, AND DRAWING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a drawing apparatus capable of reducing the number of bits per pixel and also reducing data size. <P>SOLUTION: The drawing apparatus 100 is characterized by including: a pattern partitioning section 46 that acquires pattern information including at least one of a plurality of pattern figure codes, an array flag, the number of arrays and an array pitch; an accumulation table forming section 50 that relates each pattern information to the number of use for each pattern information for each predetermined region; a Huffman tree forming section 52 that forms a Huffman tree, a Huffman table forming section 54 that forms a Huffman table that relates each pattern information to an encrypted binary variable length code, wherein a smaller numerical value is assigned to pattern information as the frequency of use increases; a format converting section 56 that converts data in a predetermined region defined as drawing data in a predetermined format using a variable length code, and a drawing section 150 that draws a plurality of patterns in a test piece based on the converted data in the predetermined region. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010067808(A) 申请公布日期 2010.03.25
申请号 JP20080233021 申请日期 2008.09.11
申请人 NUFLARE TECHNOLOGY INC 发明人 SHIBATA HAYATO
分类号 H01L21/027;G03F1/20;G03F1/68;G03F7/20 主分类号 H01L21/027
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