SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE CONVEYING APPARATUS FOR USE IN THE SAME

摘要

PURPOSE: An apparatus for processing a substrate and an apparatus for transferring the substrate for the same are provided to improve the speed for processing the substrate by reducing the occupied area of the apparatus. CONSTITUTION: A substrate processing part simultaneously processes a plurality of substrates which is vertically arranged. A first transverse transfer unit transfers a first transverse support part along a first transverse passage(101). The first transverse support part supports the substrate. A second transverse transfer unit transfers a second transverse support part along a second transverse passage(102). A elevation unit elevates a elevation support part(105) to a position in which substrate is loaded/unloaded. A transfer unit transfers the substrates.