发明名称 ZINC OXIDE-BASED SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING SAME
摘要 A semiconductor device that has excellent characteristics and mass productivity wherein the introduction of defects thereinto at the time of device separation is prevented, and a method for producing the semiconductor device. In particular, there is provided a high-performance semiconductor device having excellent luminous efficiency, longevity and mass productivity; and a method for producing this semiconductor device. The method for producing the semiconductor device has a step of forming, between a substrate comprising zinc oxide (ZnO) and a device operating layer, a defect-blocking layer having a crystal composition that is different from that of the substrate, and a step of forming device dividing grooves to a depth that goes beyond the defect-blocking layer, relative to the device operating layer side surface of the substrate on which the device operating layer is formed.
申请公布号 US2010065843(A1) 申请公布日期 2010.03.18
申请号 US20090556914 申请日期 2009.09.10
申请人 STANLEY ELECTRIC CO., LTD. 发明人 KYOTANI CHIZU;HORIO NAOCHIKA
分类号 H01L33/00;H01L21/302 主分类号 H01L33/00
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