ABRASIVE SLURRY FOR GLASS

摘要

PROBLEM TO BE SOLVED: To provide an abrasive slurry for glass capable of highly accurately working a polishing surface of glass and performing polishing at a comparatively high speed.

SOLUTION: The maximum particle diameter Tmax of abrasive particles measured by a transmission electron microscope is 90 nm or below, the maximum particle diameter Tmax and an average particle diameter Tavg of the abrasive particles measured by the transmission electron microscope satisfy Tmax/Tavg≥3 and particle size distribution of the abrasive particles has at least a first peak appearing in the vicinity of the average particle diameter value and a second peak appearing in the vicinity of a particle diameter 3 times as large as Tavg or larger.

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