| 摘要 |
PURPOSE: A vertical heat-treating apparatus is provided so that a movement loading of a boat of narrow-pitch is realized by reducing page and thickness of a movement loading board which can be enlarged consequently. CONSTITUTION: A movement loading board of a vertical heat-treating apparatus comprises a supporting projection(34), a level difference, and a regulation piece(41). In a supporting projection is the upper side of the movement loading board, the processed substrate is supported in of backward and forward, approximately, the central part and rear. A level difference is installed in the domain lower-part of the leading end side. The regulation piece regulates the peripheral part of the processed substrate in order not to move the front direction and right and left.
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