| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an airtight terminal which is high in airtight reliability for satisfactorily transferring electric signals with small electric resistance and a package for storing an electronic component, and electronic equipment. <P>SOLUTION: An airtight terminal is provided with: a metallic pin 1; a first annular member 21 brazed to the outer peripheral face of a pin 1 into which the pin 1 is inserted; a second annular member 22 brazed to the outer peripheral section of the first annular member 21 into which the pin 1 is inserted; and a ceramic member 3 brazed through a metallization layer 3b to the outer peripheral section of the second annular member 22 into which the pin 1 is inserted. The first annular member 21 is configured having smaller thermal expansion coefficients and higher rigidity than those of the pin 1 and the second annular member 22. Thus, it is possible to provide the airtight terminal in which any crack is hardly generated in the ceramic member 3 even by using metal whose electric resistance is smaller than that of the pin 1. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
