摘要 |
<P>PROBLEM TO BE SOLVED: To provide a recording head suitable for finely forming a plurality of communicating paths symmetrically arranged about a central axis of a discharge port. Ž<P>SOLUTION: The recording head, which discharges a liquid from the discharge port by making heat energy acting on the liquid, is provided with: a supply chamber including a pressurizing space arranged under the discharge port for pressurizing the liquid to discharge it from the discharge port; and a semiconductor substrate including a liquid supply path for supplying the liquid to the supply chamber, and a partition between the liquid supply path and the supply chamber. The plurality of communicating paths are formed in the partition for making the liquid supply path communicate with the supply chamber, and are symmetrically arranged about the central axis of the discharge port. The partition is formed of a semiconductor having an impurity in a higher concentration than the circumference of the partition in the semiconductor substrate. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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