PERPENDICULAR FINE-CONTACT PROBE HAVING A VARIABLE-STIFFNESS STRUCTURE

摘要

A perpendicular fine-contact probe according to one aspect of the present invention comprises: a column part in which a plurality of units are formed linking together, stacking up in the length direction; and a tip part which is formed at the tip of the column part and which makes contact with an electrode pad of a semiconductor chip. The units comprise: probe bodies which alternately curve to left and right; and projections which protrude from the probe bodies and are located to left and right relative to the centre in the width direction, and which can support the probe bodies by coming into contact with the probe bodies which come into adjacent abutment during compression.