Method for drilling micro-hole and structure thereof

摘要

Disclosed is a micro-hole structure and a method for forming the micro-hole. A working energy source is projected onto a predetermined drilling site on a first surface of a substrate for a given period of time so as to melt a portion of the substrate to form a working energy entering section until the working energy source penetrates through a second surface of the substrate to form a micro-hole. A melt formed by melting a portion of the substrate in the micro-hole next to the second surface is allowed to reflow in a direction opposite to the projection of the working energy source to thereby form a reflow section in the substrate. Further, a two or more stages emission of laser pulses is used to form the micro-hole to control the bore diameter of the micro-hole.