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发明名称
HERSTELLUNGSVERFAHREN FÜR EIN SOI-BAUELEMENT MIT VERRINGERTER ÜBERGANGSKAPAZITÄT
摘要
申请公布号
DE60235162(D1)
申请公布日期
2010.03.11
申请号
DE20026035162
申请日期
2002.05.20
申请人
INTERNATIONAL BUSINESS MACHINES CORP.
发明人
FURUKAWA, TOSHISHARU
分类号
H01L29/786;H01L21/336
主分类号
H01L29/786
代理机构
代理人
主权项
地址
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