| 摘要 |
PROBLEM TO BE SOLVED: To provide a static pressure control device capable of controlling introduction quantities of purified air and high-temperature gas obtained by burning and purifying exhaust air discharged from a predetermined zone. SOLUTION: The device includes a static pressure adjustment chamber 850 to which the purified air and high-temperature gas obtained by burning and purifying the exhaust gas discharged from the predetermined zone is introduced; a fresh air supply mechanism which is provided in the static pressure adjustment chamber 850 to supply fresh air into the chamber 850; a high-temperature gas concentration sensor which is provided in the chamber 850 to measure a high-temperature gas concentration in the chamber 850; and a control mechanism which controls the purified air quantity and the high-temperature gas quantity introduced into the chamber 850 by driving the fresh air supply mechanism based on the high-temperature gas concentration measured by the sensor to adjust pressure in the chamber 850. COPYRIGHT: (C)2010,JPO&INPIT
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