<p>A substrate carrier arranged to hold a substrate in position is disclosed. The substrate carrier (WC) has a transparent region (2) that extends through the substrate carrier from a side of the substrate carrier on which the substrate is to be held to an opposite side of the substrate carrier, the transparent region being substantially transparent to a signal used to determine the position of an edge of the substrate on the substrate carrier.
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申请公布号
EP2037324(A3)
申请公布日期
2010.03.10
申请号
EP20080252915
申请日期
2008.09.02
申请人
ASML NETHERLANDS BV
发明人
VAN DIJK, PAULUS WILHELMUS LEONARDUS;VAN BUEL, HENRICUS WILHELMUS MARIA;KEIJSERS, GERARDUS JOHANNES JOSEPH;ONVLEE, JOHANNES;VAN DEN BROEK, JOHANNES ARIE