| 摘要 |
<p>PURPOSE: A method for manufacturing a dog-bone pattern is provided to reduce a turn-around time for manufacturing a mask by removing patterns areas which is not patterned on a wafer. CONSTITUTION: The actual size of a dog-bone pattern is determined based on the hole size in each pattern(S400). The size of the dog-bone pattern is expanded into a pre-set size of the pattern. The expanded pattern is applied to each pattern(S402). Whether the applied dog-bone patterns which are adjacent to each other are overlapped is determined(S404). A clearance area is set based on the X axis of the pattern which is adjacent to the overlap area(S406). The actual dog-bone pattern is applied to the adjacent patterns(S408). The actual dog-bone pattern in the clearance area is removed to form a final dog-bone pattern(S410).</p> |
