发明名称 Positive photosensitive resin composition
摘要 The present invention provides a positive photosensitive resin composition, characterized by comprising 1 to 50 parts by mass of a photo-acid generator and 0.01 to 70 parts by mass of a terpene compound in combination with 100 parts by mass of a hydroxypolyamide having repeating units. A terpene compound can be combined with a hydroxypolyamide having a particular structure to provide a positive photosensitive resin composition excellent in positive lithography performance such as sensitivity and resolution.
申请公布号 US7674566(B2) 申请公布日期 2010.03.09
申请号 US20060091122 申请日期 2006.10.20
申请人 ASAHI KASEI EMD CORPORATION 发明人 SHIBUI SATOSHI
分类号 G03F7/023;G03F7/30 主分类号 G03F7/023
代理机构 代理人
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