| 摘要 |
<P>PROBLEM TO BE SOLVED: To expose, into a desired pattern shape, a surface or an inner surface of a flexible exposure object material that is applied with a photosensitive material having an outer shape of a circular cross section and long in an axial direction. <P>SOLUTION: An exposure optical system is disposed which includes an adsorption block for adsorbing and holding the exposure object material and correcting the axial shape of the exposure object material into a linear shape, a rotating stage for axially rotating the exposure object material and/or a moving stage for axially moving the exposure object material, and a light source for exposing the photosensitive material provided for the exposure object material. A part of the exposure object material where the axial shape is corrected into the linear shape on the adsorption block. <P>COPYRIGHT: (C)2010,JPO&INPIT |
