| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a capacitance type acceleration sensor showing high sensitivity by reducing a parasitic capacity between conductive members for a fixed electrode and a movable electrode provided on a substrate. Ž<P>SOLUTION: This electrode substrate is equipped with a substrate 19 having a pair of main surfaces, a plurality of conductive members 16a, 16b, 16g penetrating the substrate 19 and formed so as to be exposed on both main surfaces of the substrate, and a ground electrode 16h formed so as to enclose at least one conductive member 16g. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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