| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and a device for evaluating permeability of organic gas, capable of accurately evaluating permeability of the organic gas targeting a sealed casing, and improving accuracy of permeability evaluation of the organic gas. Ž<P>SOLUTION: An inert gas is supplied to a heating thermostat 1 having a magnetic disk device 10 disposed therein. The inert gas supplied into the heating thermostat 1 is adsorbed and collected by an adsorption pipe 6 connected to the outside of the heating thermostat 1. When the inert gas supplied into the heating thermostat 1 enters the inside of the magnetic disk device 10, the organic gas component of the inert gas is adsorbed by an adsorbent 11 disposed in the magnetic disk device 10, the concentration of organic gas by the adsorption pipe 6 and the concentration of organic gas by the adsorbent 11 are analyzed, and permeability of the organic gas is evaluated based on the ratio of organic gas of both. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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