发明名称 Dual-Level Self-Assembled Patterning Method and Apparatus Fabricated Using the Method
摘要 A method of fabricating a device includes: providing a substrate having a patterned surface, depositing a first-level self-assembled material on at least a portion of the patterned surface, wherein the position and/or orientation of the first-level self-assembled material is directed by the patterned surface, to form a first nanostructure pattern, and depositing a second-level self-assembled material on at least a portion of the first nanostructure pattern to form an array of nanostructures of the second-level self-assembled material. An apparatus fabricated using the method is also provided.
申请公布号 US2010051904(A1) 申请公布日期 2010.03.04
申请号 US20080203958 申请日期 2008.09.04
申请人 SEAGATE TECHNOLOGY LLC 发明人 XIAO SHUAIGANG;YANG XIAOMIN
分类号 H01L29/06;H01L21/00 主分类号 H01L29/06
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