| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a determination method of edge inspection apparatus capable of precisely determining collection efficiency of an entire ellipse mirror of the edge inspection apparatus. Ž<P>SOLUTION: The edge inspection apparatus, equipped with a luminescent part irradiating an edge of inspected substrate with inspection light, an ellipse mirror arranging the edge of inspected substrate at a first focal position and collecting reflection light reflected at the edge of inspected substrate to a second focal position, and a detection part arranged at the second focal position and detecting an intensity of the reflected light, determines a collection efficiency at the detection part. The determination method comprises a dulling pseudo-element formation step (S1) forming a first dulling pseudo-element aggregate, at which dulling pseudo-elements are arranged under a predetermined rule, in a range where at least inspection light of a dulling determining substrate is irradiated at a time to an edge of the dulling determining substrate; a first detection step (S4) irradiating the first dulling pseudo-element aggregate with inspection light and detecting an intensity of reflected light collected by the ellipse mirror; and a determination step (S3) determining goodness/badness of the collection efficiency based on the intensity of the reflected light detected in the first detection step. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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